Trek | 646(3kV,6.5mA)
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646(3kV,6.5mA) DataSheet 다운로드
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모델646은 Electrostatic Chuck Supply 로서 다양한 기능을 제공한다. 특히 기술화된 용법은 효율성의 증가를 보여주었고, 추가적으로 끈적이는 wafer 제거와 wafer popping 문제를 해결하여, 입자 오염을 더욱 더 효율적으로 제어할 수 있다는 장점이 있다. |  | ||||||
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| • Supports both Coulombic and Johnsen-Rahbek ESC technologies • User configurable for custom clamp and declamp sequences and wave shapes • Electrostatic chuck profiles can be uploaded to the unit and stored internally via a user-friendly software interface • Reduces backside gas errors, increases throughput, and eliminates sticky/popping wafer issues • Lockable front panel control interface • Ability to control parameters such as over-current, wafer-present and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control • Wafer detection includes no wafer, wafer present or wafer clamped status • Includes in-process-adjustable amplitude/offset and output-control versatility • Output can be controlled by back panel I/O, serial computer command or front panel controls • NIST-traceable Certificate of Calibration provided with each unit | |
| -기타설명- | |
| • Electrostatic-driven handling of materials • Semiconductor wafer processing • Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling |
